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Inductively coupled RF plasma reactor with floating coil antenna for reduced capacitive coupling
Inductively coupled RF plasma reactor with floating coil antenna for reduced capacitive coupling
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机译:具有浮动线圈天线的电感耦合RF等离子电抗器,可减少电容耦合
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摘要
In an inductively coupled RF plasma reactor having an inductive coil antenna connected through an RF impedance match network to an RF power source, capacitive coupling from the antenna to the plasma is reduced by isolating the coil antenna from the RF power source by an isolation transformer, so that the potential of the coil antenna is floating. The output of the RF impedance match network is connected across the primary winding of the isolation transformer while the floating coil antenna is connected across the secondary winding of the isolation transformer.
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