ETCHING PROCESS CONTROL METHOD FOR THIN SHEET METALLIC MATERIAL AND QUALITY ASSURANCE METHOD FOR ETCHED PRODUCT

摘要

PROBLEM TO BE SOLVED: To provide a process control method for the etching process of thin sheet metallic materials, such as shadow masks and lead frames and a quality assurance method for etching products. ;SOLUTION: The rapid and suitable process control is made by controlling the process for measuring the shapes of the etched parts of etched products of the thin sheet metallic materials by a scanning type laser microscope and the process for displaying the measurement data as three-dimensional images by image processing computation and the process conditions of the etching process in accordance with the results of the image display. The image display data id preserved as digital data, by which the data is made helpful for the quality assurance of the etched products.;COPYRIGHT: (C)1998,JPO