PRODUCTION OF METALLIC CARBONATE, METHOD FOR FORMING THIN FILM OF METALLIC CARBONATE AND CARBON DIOXIDE SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a producing method of a metallic carbonate, a thin film forming method of the metallic carbonate and a carbon dioxide sensor capable of making a sensor element part small-sized and quickening response speed. ;SOLUTION: The producing method of the metallic carbonate is by thermally decomposing or hydrolyzing an organic metallic carbonate expressed by the formula (wherein, M expresses a metal, R expresses an organic group and (n) expresses the valency of the M). The forming method of the metallic carbonate thin film comprises thermally decomposing after applying a solution or a dispersion of the organic metallic carbonate expressed by the formula or applying a hydrolyzed solution of the organic metallic carbonate expressed by the formula. The carbon dioxide sensor has the metallic carbonate produced by the decomposition of the organic metallic carbonate expressed by the formula.;COPYRIGHT: (C)1998,JPO