PRODUCTION OF YBCO THIN FILM AND YBCO THIN FILM COATED BODY

摘要

PROBLEM TO BE SOLVED: To form a YBCO thin film having the c-axis perpendicular to the substrate, high critical current density and little interfaces of crystal grains on the substrate by heating a MgO single crystal substrate having {110} plane direction in a specified temp. range and forming a film of oxide superconducting YBCO thereon. ;SOLUTION: A MgO single crystal substrate having {110} plane direction is heated at ≥650°C, on which a film of oxide superconducting YBCO is formed. The plane direction {110} represents all equivalent planes of (100), (010), (-100), etc. By using the substrate having this plane direction, the film formed has orientation along the c-axis and YBCO grains oriented in the plane direction. The thin film is formed by a normal method such as laser ablation, sputtering, etc. The substrate temp. during forming the film is preferably controlled to 675 to 850°C. The obtd. thin film-coated material having the YBCO thin film shows excellent superconducting characteristics and is useful as a superconducting device in the field of electronics.;COPYRIGHT: (C)1998,JPO