TEMPERATURE MEASURING MECHANISM OF HIGHTEMPERATURE HEATING FURNACE

摘要

PROBLEM TO BE SOLVED: To prevent large external stress from being applied to a thermocouple protective pipe by extending a base end side of the thermocouple protective pipe to the position in the vicinity of a furnace container, and turnably supporting the base end part by the furnace container in the axial direction and in the radial direction of the furnace container through a protective pipe support member. ;SOLUTION: A base end side of a thermocouple protective pipe 61 is pierced through a heating body, a heat insulation material and a heat insulation material case, and extended to the position in time vicinity of a furnace container, and a base end part is turnably supported by a body part of the furnace container through a protective pipe support member 62 in the axial direction and in the radial direction of the furnace container. The displacement of the position of a tip part of the thermocouple protective pipe 61 caused by the thermal expansion of an inner case is absorbed by a flexible pipe 62C of the protective pipe support member 62 to prevent the external stress from being applied to the thermocouple protective pipe 61. The thermocouple protective pipe 61 comprises a support pipe 62a of the protective pipe support member 62 and the flexible pipe 62c consisting of a bellows to connect a lid body 62b to a flange 61a formed on the base end part of the thermocouple protective pipe 61.;COPYRIGHT: (C)1998,JPO