VACUUM ULTRAVIOLET LIGHT SOURCE AND ULTRAVIOLET LIGHT SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a large aperture while sealing gas at a low pressure, atmospheric pressure, or high pressure and to increase an area of a creeping discharge electrode by installing a creeping discharge electrode and a window member to a mesh-structure spacer, filling a clearance with mercury gas, nitrogen gas, rare gas, or halogen gas, and sticking a plurality of creeping discharge electrodes together. ;SOLUTION: To mesh-structure spacers 6, a window material 8 and a creeping discharge electrode 7 are installed, and a clearance between them is filled with gas 10 such as mercury gas, nitrogen gas, rare gas, or halogen gas, and then, a power source 15 is connected to the creeping discharge electrode 7. The creeping discharge electrode 7 is used as a part of a wall sealing the gas 10 such as mercury gas, nitrogen gas, rear gas, or halogen gas, so that the creeping discharge part and the gas 10 such as mercury gas, nitrogen gas, rare gas, or halogen gas can be easily sealed completely. On the other hand, a cooling device is installed to the creeping discharge electrode 7, and cooling effect can be improved, while a radiation area can be freely set, and a large area can be provided when a plurality of the creeping discharge electrodes 7 are stuck together.;COPYRIGHT: (C)1998,JPO