CHEMICAL SUPPLY FOR PRODUCING SEMICONDUCTOR, CHEMICAL BEING APPLIED THERETO, RECEIVER MANAGING METHOD, PHOTORESIST UTILIZING COMPUTER AND DATA MANAGING METHOD ASSOCIATED THEREWITH

摘要

PROBLEM TO BE SOLVED: To decide whether a container receiving a chemical is replaced correctly or not by affixing a bar code to the container and recognizing it optically. SOLUTION: The chemical supply for producing a semiconductor where predetermined containers are arranged, respectively, for a plurality tracks per sector and a chemical received in the predetermined containers is supplied to a process chamber comprises means 22 for reading a given mark being put on the predetermined container 10, means 34 for comparing mark information 18 read out through the mark reading means 22 with mark information 18 being set for the relevant track 12 to decide whether the mark information 18 matches each other, and means 44 for effecting an alarm operation, based on the decision results.