PROBLEM TO BE SOLVED: To obtain a defect locator for thin display in which a defective lighting point can be shifted accurately and automatically at high speed to an observing or repairing position while lessening the driving work, accelerating the work and reducing the cost through increase of the yield. ;SOLUTION: A worker shifts an XY stage 4 roughly to a position where the vicinity of a detective pixel element is reflected on a CCD camera 16 for driving. An image signal obtained through the CCD camera 16 is delivered to an image processing section 29 which then delivers image information indicative of the brightness and position to a main controller 10. The main controller 10 processes the image information to locate the defective pixel element. Subsequently, the main controller 10 shifts the XY stage 4 by the difference between the position of defective pixel element obtained at the image processing section 29 and a prestored position directly under a microscope. Consequently, the detective pixel element is located automatically at high accuracy substantially with no help of the worker.;COPYRIGHT: (C)1998,JPO
展开▼
