ELECTRON BEAM MEASURING KNIFE EDGE AND MANUFACTURE THEREFOR AND ELECTRON BEAM MEASURING METHOD USING ELECTRON BEAM MEASURING KNIFE EDGE

摘要

PROBLEM TO BE SOLVED: To measure first and second scanning directional diameters of an electron beam with high accuracy, and accurately correct astigmatism by constituting an electron beam measuring knife edge of plural knife edges. ;SOLUTION: Multilayer bodies 15, 25 and 35 using interfaces between lamination layers 16 and 17, 26 and 27, and 36 and 37 having respectively and mutually different electron beam transmissivity or reflectance or secondary electron emissivity as knife edges 18, 28 and 38, are arranged on surfaces 14, 24 and 34 vertical to flat main surfaces 13a and 13b, and an electron beam measuring knife edge 11 is constituted. Here, the layers 16, 26 and 36 are formed by using a light element as a main component, and the layers 17, 27 and 37 are formed by using a heavy element as a main component. When an electron beam is measured, the main surface 13a of a base board 12 is scanned in the X direction so as to cross an electron beam knife edge 18, and next, is scanned in the Y direction so as to cross a knife edge 28 or 38, and intensity of an electron tranmsitted to the 13b side of the base board is detected, and a diameter of an electron beam can be calculated with high accuracy by obtained two signals.;COPYRIGHT: (C)1997,JPO