PLATING BATH OF NICKEL, COBALT OR NICKEL-COBALT ALLOY AND PHOSPHORUS AND PLATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a plating bath with the cathode current efficiency and anode current efficiency well-balanced, hence without the metallic ion concn. being remakably increased, capable of maintaining the metallic ion concn. at a fixed level by selecting the anode current density and anode and capable of providing a plating film having a stabilized content of P over a long period. ;SOLUTION: This plating bath of nickel, cobalt or nickel-cobalt alloy and phosphorus for a soluble anode contains 6-30g/l water-soluble salt of metal selected from nickel and cobalt as the metallic ion, 150-800g/l at least one kind among the water-soluble sulfate, sulfamate and methane sulfamate of the metal selected from alkali metals and alkaline-earth metals as the conductive salt, 1-100g/l phosphorous acid or its salt and ≤100mg/l halogen ion and is controlled to pH0.8 to 5.;COPYRIGHT: (C)1998,JPO