CURVED SURFACE POLISHING METHOD AND CURVED SURFACE POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To scan a polishing tool at commanded scanning speed, and improve work accuracy by controlling a posture of a load shaft with a contact point on a polishing tool work surface as the center so that the load shaft of the polishing tool coincides with a normal when the normal direction of a work surface is changed by polishing scanning of the work surface. ;SOLUTION: Since a polishing head 37 can be inclined with the tip of a polishing tool 60, that is, a contact point with a work surface 34A as the center, a horizontal directional position and a vertical directional position of the polishing tool 60 is not changed by a postural change of the polishing head 37. Therefore, a required process is only to respectively drive a Y axis mechanism part 38 and an X axis mechanism part 39 according to a scanning distance of the polishing head 37, and also a Z axis mechanism part 50 according to a height of the work surface 34A. Therefore, scanning speed of the polishing tool 60 can be made to follow commanded scanning speed even in a place where a normal directional change in the work surface 34A is large.;COPYRIGHT: (C)1998,JPO