PARAMETRIC ANALYSIS METHOD FOR CALCULATING INTENSITY OF LIGHT

摘要

PROBLEM TO BE SOLVED: To reduce the number of calculating times of mutual transmission coefficients and the number of calculating times of the Fourier transformation of a mask by systematically changing each condition, such as the coherence factor, a mask condition, and an optical condition by deciding the changing order of each condition. SOLUTION: After an optical condition is set, the mutual transmission coefficients to the maximum degrees Lmax and Mmax which vary depending upon the maximum value of a coherence factor and the minimum value of the cycle frequency (f) of a mask pattern are calculated and tabulated. After a mask condition is set, the Fourier transformation of a mask to the maximum degrees Lmax and Mmax which vary depending upon the maximum value of the coherence factor and the cycle frequency (f) of the mask pattern decided by the mask condition are calculated and tabulated. Then the intensity distribution of light is repetitively calculated by changing the coherence factor by using the tables and the formula (where, t, t, t, and T respectively represent the complex amplitude transmission coefficient of the mask, the complex conjugate of t*, the Fourier transformation of t, and mutual transmission coefficient). In addition, the abovementioned calculation is repeated by changing the mask condition and optical condition.