METHOD FOR CALCULATING LIGHT INTENSITY SLOPE, METHOD FOR CALCULATING LIGHT INTENSITY LOG SLOPE, AND MEDIUM RECORDING PROGRAM DESCRIBING THESE METHODS FOR CALCULATION

摘要

PROBLEM TO BE SOLVED: To calculate a light intensity slope at high rate.;SOLUTION: In the method for calculating the light intensity slope of a projection image when light from a photomask is projected to an object through an optical system, a characteristic function ϕ representative of the characteristic of the optical system is calculated and tables Φ, Φx, Φy are formed by integrating the characteristic function ≃, respectively, in a rectangular region, a horizontal band region and a vertical band region. A light intensity slope I' is determined using these tables in conjunction with the data of the photomask.;COPYRIGHT: (C)2001,JPO