Al-Ti system or Al-Ta-based wear-resistant hard film and method of manufacturing the same

摘要

PURPOSE: To inexpensively produce the dense and high-hardness wear resistant film which well adheres tightly to a base material by simple stages without generating the cracking and peeling of the film formed on the base material at the boundary thereof even if the film is formed without preheating the base material prior to coating. ;CONSTITUTION: The film is formed on the base material in an inert gaseous atmosphere by a sputtering method or ion plating method using an evaporating source material having the compsn. expressed by Al_aTi_b (where 62at%≤a≤85 at.%, 15at.%≤b≤38at.%, and a+b=100at.%) or Al_cTa_d (where 60at.%≤c≤80 at.%, 20at.%≤d≤40at.%, and c+d=100at.%) while continuously or stepwise changing the supply rate of reactive gases of a nitrogen system. The wear resistant hard film which is changed in the compsn. and structure gradiently from the substantially amorphous metal of the above-mentioned compsn. to an (Al, Ti)N or (Al, Ta)N crystalline ceramic phase toward the film surface is obtd. by this method.;COPYRIGHT: (C)1994,JPO&Japio