By microwave plasma CVD method the diamond membrane synthetic device

摘要

PURPOSE:To make a diamond film uniform in thickness by supplying electric current to an electromagnetic coil placed around a reaction chamber and applying a proper magnetic field to plasma. CONSTITUTION:A gaseous methane-H2 mixture is introduced into a reaction chamber 13 fro(n a feed pipe 14 and microwaves generated by a microwave oscillator 11 are introduced into the chamber 13 through a chamber 12 with an inverted funnel-shaped end to generate plasma between the top of the chamber 13 and a substrate 17. At the same time, electric current is supplied to a circular electromagnetic coil 18 placed around the chambers 13, 12 and a generated electric field is applied to the plasma to synthesize a diamond film of a uniform thickness on the substrate 17.