METHOD FOR MANUFACTURING BLAZE DIFFRACTION OPTICAL ELEMENT, AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To improve the diffraction efficiency by arranging resist tilted to the optical axis of exposure light and making the stepped surface of a blazed resist pattern vertical to a substrate surface. SOLUTION: When a substrate 3 is mounted on a translation stage 5, the translation stage 5 is tilted to the optical axis of an exposing laser beam EL. Namely, the translation stage 5 is arranged with a tilt angle α to X-axis around Y-axis. And then, the translation stage 5 is translated by controlling a driving part 6 by a main control device 7 so that a converging point of the exposing laser beam EL is positioned at a plotting start position of the resist pattern, namely, the scanning start position of the converging point FP of the exposing laser beam EL. Next, a shutter, which is located in a light path of the exposing laser beam EL, is opened. After that, the main control device 7 controls an intensity modulator 1 and the driving part 6 so that an exposure distribution is formed by which the blazed resist pattern is obtained.