A method of manufacture of an image creation apparatus (ijm45)

摘要

A method of manufacture of an ink jet print head arrangement is disclosed including a series of nozzle chambers, the method comprising the steps of: (a) utilizing an initial semiconductor wafer having an electrical circuitry layer formed thereon on; (b) etching a series of slots in at least the circuitry layer to define a nozzle cavity inlet; (c) depositing and etching a first layer of magnetic flux material on the electrical circuitry layer to define a first magnetic plate; (d) depositing and etching a insulating layer on the first layer and the electrical circuitry layer, the etching including etching vias for a subsequent conductive layer; (e) depositing and etching a conductive layer in for form of a conductive coil conductively interconnected to the electrical circuitry layer; (f) depositing and etching a hydrophobic material layer in the region of the conductive coil; (g) depositing and etching a sacrificial material layer in the region of the first magnetic plate and the coil, the etching including defining a cavity for the walls of a nozzle chamber; (h) depositing and etching a second layer of magnetic flux material over the sacrificial material so as to substantially enclose the conductive coil; (i) etching away the sacrificial material; (j) etching an ink supply channel through the wafer to form a fluid communication with the nozzle chamber.