High-frequency apparatus using quartz crystal resonator and its production method

摘要

Disclosed is a high-frequency apparatus using a quartz crystal resonator including a voltage controlled oscillator, a temperature compensated quartz crystal oscillator and the like, in which a quartz crystal resonator itself is bonded with coupling of silicon, oxygen, hydrogen, hydroxyl group and the like directly to a semiconductor substrate having an active element, thus being integrated in a unitary body.