Quartz boat of diffusion equipment for semiconductor manufacturing

摘要

The present invention relates to a quartz boat of a diffusion apparatus for manufacturing a semiconductor to improve process gas flow during a diffusion process to achieve uniform diffusion.;The present invention is a quartz of the diffusion equipment for semiconductor manufacturing, consisting of a cylindrical upper and lower body 12, 13, and a support leg 14 formed on the lower body 13, a plurality of wafers W are put therein. In the boat, a through hole through which process gas passes through the circumferential surfaces 12a and 13a of the upper and lower bodies 12 and 13 and the right end surfaces 12b and 13b toward the exhaust port 19. 15) to (17) are formed, and the left end surfaces 12c and 13c opposite the exhaust port 19 are blocked to allow process gas to pass therethrough.;Therefore, a uniform process is performed by stabilizing the atmosphere by improving the process gas flow, thereby improving the yield by reducing defects.