Efficiency Evaluation System and Efficiency Evaluation Method of Semiconductor Particle Measuring Machine

摘要

An efficiency evaluation apparatus and an efficiency evaluation method of a semiconductor particle measuring device.;According to the present invention, the particles randomly generated are introduced into the vacuum chamber in one direction to be introduced into the vacuum chamber, and the particles are measured by the particle measuring instrument. Particles introduced in one direction and the other direction are measured by the atmospheric pressure particle measuring instrument under normal pressure. By measuring, it is characterized in that the efficiency evaluation is performed as a comparison of the measurement data measured simultaneously with the particle measuring device and the atmospheric pressure particle measuring device.;Therefore, according to the present invention, it is possible to perform the actual process under the optimal conditions by the accurate efficiency evaluation of the particle measuring instrument has the effect of maximizing productivity.