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AUTO-SWITCHING SYSTEM OF ARC VOLTAGE

机译:弧压自动切换系统

摘要

The present invention relates to an automatic arc voltage switching system, and more particularly, to an arc voltage automatic switching system that automatically switches voltages by using a gas pressure of a gas supply device, which is a conventional voltage switching. In the embodiment of the present invention by sensing the air pressure increases in the pneumatic line to operate the relay of the transformer control circuit 30 to switch the voltage, even if the operator does not have to switch the terminal to the jumper wire, simply by operating the switch (SV63) In order to provide an automatic arc voltage switching device that has only an effect capable of efficient and convenient operation of semiconductor manufacturing equipment by changing the above, this effect of the present invention can be widely used in semiconductor manufacturing equipment using arc discharge.
机译:电弧电压自动切换系统技术领域本发明涉及一种电弧电压自动切换系统,尤其涉及一种通过使用气体供给装置的气压来自动切换电压的电弧电压自动切换系统,该气体供给装置是以往的电压切换。在本发明的实施例中,即使操作员不必将端子切换到跳线,也可以通过感测气动管路中的气压升高来操作变压器控制电路30的继电器来切换电压。通过改变上述内容,以提供仅具有能够有效且方便地操作半导体制造设备的效果的自动电弧电压开关装置(SV63),本发明的这种效果可以在半导体制造设备中广泛使用。使用电弧放电。

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