OPTICAL DEVICES WITH ELECTRON-BEAM EVAPORATED MULTILAYER MIRROR

摘要

The present invention embodies a VCSEL having a top mirror comprising at least one pair of quarter wavelength layers, each pair consisting of a low refractive index layer and a high refractive index layer, wherein the high refractive index layer is selected from GaP and ZnS. The low refractive index layer is a semiconductor and is selected from rod silicate glass (BSG), CaF2, MgF2 and NaF. Mirrors formed by stacking multiple GaP / BSG or ZnS / CdF ₂ pairs are particularly useful in vertical cavity surface emitting lasers. Such mirrors have high reflective properties which are required for efficient operation of the laser. GaP / BSG or ZnS / CaF2 mirror structures represent a significant advance over designs for prior art VCSELs in terms of final reflectance, low loss, and post growth processig compatiblity.