ATOM AND MOLECULAR BEAM RADIATION DEVICE BY THE ELECTRON COLLISION HEATING

摘要

The present invention is an atomic and molecular beam generating device for heating the evaporation vessel by accelerating the hot electrons generated when installing the filament in the bottom of the evaporation vessel or inside the support and flowing the current to the filament to a high voltage applied between the filament and the evaporation vessel, The present invention relates to an electron collision heating atomic and molecular beam generating method and apparatus for attaching multiple heat reflectors around an evaporation vessel and a support and completely separating the filament portion and the evaporation vessel portion to improve the stability of the device electrically and thermally.