Rate-of-rotation sensor with decoupled orthogonal primarily - and secondary vibrations

摘要

A rotation rate sensor (100) detecting rotation of the same, comprising a base body (102), a primary oscillator (106) which is maintained in a movable position by a primary suspension device (104) in relation to the base body (102), and a secondary oscillator (114) which is maintained in a movable position in relation to the primary oscillator (106) by means of a secondary suspension device (112) which is separated from the primary suspension device (104). The secondary suspension device (112) is so designed that a movement which can be exerted upon the primary oscillator (106) can be transmitted to the secondary oscillator (11) while no substantial movement of the secondary oscillator (114) caused by the coriolis force can be transmitted back to the primary oscillator (106). Furthermore, the main surfaces of the primary oscillator (106) and the secondary oscillator (114) extend substantially on the same plane whereby the movement of the primary oscillator (106) and/or the secondary oscillator also occurs on this plane.