Force sensor esp pressure sensor in LTCC technology

摘要

The force sensor is used in low temperature co-fire ceramic (LTCC) technology. It has at least one measurement membrane (3.5) which is deflected in the direction of a layer spaced from the membrane due to a force to be measured. The sensor also has an analyser (9) for detection and deflection. The sensor also has a stop arrangement (3.3) which limits the deflection of the membrane. The membrane is formed such that it is undamaged by deflection limited by the stop. Preferably the surface layer nearest to the membrane serves as the stop arrangement. Alternatively a stop arrangement may be attached to the membrane and/or the layer to limit the membrane deflection.