A method for measuring at least two unknown physical variables of a single-layer thin film or of the uppermost layer of a multilayer thin film - structure

摘要

a method for measuring an unknown size, such as a refractive index, absorption coefficient and the thickness of the top layer of a multilayer thin film structure, which is on a substrate whose refractive index is trained and absorption coefficient are known, a d with the refractive index.the absorption coefficient and the thickness of the other layers except the top layer position or the multilayer thin film structure are known, and at least the refractive index n1, the absorption coefficient k1 and the thickness d1 of the top position is unknown, the step measuring the energy reflexionsgrade, step, setting the functionsthe unknown elements, and the step, the functions of mathematical to solve.