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A method for monitoring a atmospheres pressure glow discharge plasma
A method for monitoring a atmospheres pressure glow discharge plasma
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机译:一种监测大气压力辉光放电等离子体的方法
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摘要
The generation of glow plasma due to discharge at an atmospheric pressure and its stabilization are monitored by counting the number of current pulses. Alternatively, they are monitored by the change of a retention voltage and/or the change of the full current value besides the number of the current pulses, or by Lissajous figures, to detect the plasma state and to stabilize and control the plasma. These procedures make it possible to stabilize and monitor the atmospheric pressure glow discharge plasma accurately, rapidly and readily, and to control the plasma.
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