DEVICE AND METHOD FOR THREE-DIMENSIONAL MEASUREMENTS AND IN SITU OBSERVATION OF A SURFACE LAYER DEPOSITED ON A STACK OF THIN LAYERS

摘要

P Device and method for three-dimensional measurements and observation of a surface layer of a thin film structure, comprising a surveillance unit 4 which comprises a video camera 12, a wide beam light source 14, a narrow beam light source 20, an operating and control unit and a horizontal displacement table. The device comprises a Wollaston prism 24 arranged on the optical path of the narrow light beam, to obtain two narrow light beams whose polarization states are rectilinear and orthogonal to each other, a polarizer 27 arranged on the optical axis of the Wollaston prism 24 so as to be crossed by the narrow light beam reflected after its passage through the Wollaston prism 24, and a detection cell 28. /P