Field emission cold cathode having micro electrodes of different electron emission characteristics

摘要

In a field emission cold cathode composed of a plurality of micro cold cathodes, the diameter of a plurality of openings formed in a gate electrode is large at a central region of an electron emission zone but small at a peripheral region of the electron emission zone, or the thickness of the gate electrode is small at the central region of the electron emission zone but large at the peripheral region of the electron emission zone. Alternatively, the thickness of an insulator layer is small at the central region of the electron emission zone but large at the peripheral region of the electron emission zone. Or, a resistance layer is provided between a substrate and a plurality of electron emission electrodes, and resistivity of the resistance layer is small at the central region of the electron emission zone but large at the peripheral region of the electron emission zone.