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Multi-zone method for controlling voc and nox emissions in a flatline conveyor wafer drying system

机译:在平板式输送机晶圆干燥系统中控制发声和NOx排放的多区域方法

摘要

Environmental enhancement by controlling volatile organic compound (VOC) and NO.sub.x emissions in a flatline wafer drying system. The method is characterized by advancing the wafers of the type used in manufacture of oriented strand board (OSB) on a flatline conveyor embodying a plurality of dryer zones. Particularly, heating the dryer zones in successive lower temperatures in the range 500° F. to 200. degree. F. by flowing heated air upwardly through the flatline wafer drying conveyor; removing VOC-rich exhaust air from a primary dryer zone while flowing heated air upwardly therein and removing VOC-rich exhaust air from a secondary dryer zone while flowing heated air from therein.
机译:通过控制平板式晶圆干燥系统中的挥发性有机化合物(VOC)和NOx排放来改善环境。该方法的特征在于,在具有多个干燥区的平板输送机上推进用于制造定向刨花板(OSB)的类型的晶片。特别地,以连续的较低温度在500°F至200°范围内加热干燥器区域。 F.使加热的空气向上流过平板式晶圆干燥输送机;从主要干燥器区域中除去富含VOC的废气,同时在其中使加热的空气向上流动;从次要干燥器区域中除去富含VOC的废气,同时使其中的加热空气流动。

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