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Method for production of SiO.sub.2 glass material having regions changed in light refractive index and SiO.sub.2 glass material produced by the method

机译:具有改变光折射率的区域的SiO 2玻璃材料的制造方法以及通过该方法制造的SiO 2玻璃材料

摘要

A method for producing a SiO.sub.2 glass material having regions changed in light refractive index is provided which comprises implanting at least 5×10.sup.19 Ge ions/cm.sup.3 into a SiO.sub.2 glass substrate, heat-treating the substrate at a temperature exceeding 300. degree. C., and exposing the substrate to an ultraviolet light. Also provided is a SiO.sub.2 glass material produced by the method.
机译:提供了一种制造具有改变了光折射率的区域的SiO 2玻璃材料的方法,该方法包括将至少5×10 2 19 Ge离子/ cm 3注入到SiO 2玻璃基板中。然后,在超过300度的温度下对衬底进行热处理。 C.,并将基板暴露在紫外线下。还提供了通过该方法生产的SiO 2玻璃材料。

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