Production manner of optical being induced index of refraction change glass material, index of refraction change manner null of optical being induced index of refraction change glass material and glass

摘要

PROBLEM TO BE SOLVED: To obtain the subject glass material enabling the elevation of its refractive index by the irradiation of UV light and enabling to induce the large changes of the refractive index with the light by injecting a prescribed ion into a SiO₂ substrate by an ion injection method and subsequently applying a specific treatment to the ion-injected substrate. ;SOLUTION: An SiO₂ substrate is injected with Ge ions by an ion injection method and subsequently thermally treated. The ions are injected in an amount of preferably ≥5×10¹⁹ ions/cm³g, more preferably 1×10²⁰ ions/cm³. The ion- injected substrate is preferably thermally treated at a temperature of 300-1000°C for 23hr. The refractive index of the glass material can be changed by the irradiation of UV light. The source of the irradiated UV light is preferably a laser light (e.g. ArF laser light) having a wavelength of ≤300nm and an energy density of ≥10mJ/cm².;COPYRIGHT: (C)1997,JPO