Multiaxis distance measurement device for NC machine tools

摘要

Interferometer 14 is equipped with a light directing mechanism part for causing the incoming laser beam to be reflected in the x, y, and z axis directions and a switching mechanism for the light directing mechanism part. Computer 20 provides driving commands sequentially to the NC controller 22 in accordance with the contents of a measurement program to thereby operate milling machine A in accordance with a prescribed procedure, calculates correction data by comparing the length measurement data, obtained at the laser head 12, with reference data, causes the correction value to be taken into the NC controller 22, and starts up the controller 24 and operates the switching mechanism of the multiaxis interferometer 14 after the end of work for each axis to change the axial direction measured.