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Method for local temperature sensing for use in performing high resolution in-situ parameter measurements
Method for local temperature sensing for use in performing high resolution in-situ parameter measurements
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机译:用于执行高分辨率现场参数测量的局部温度感测方法
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摘要
An apparatus and method for measuring a parameter of a sample or component at a measurement temperature, wherein the parameter and the measurement temperature are measured at substantially the same time. A temperature coefficient of the sample or component is also established by using temperature fluctuations measured at or near the sample at the time at which the parameter is measured. The temperature coefficient is used to correct the measured parameter data and enhance its stability.
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