CALIBRATED-VALUE DETECTION METHOD FOR COORDINATE-MEASURING MACHINE AND CALIBRATION METHOD FOR SHAPE DATA USING THE SAME CALIBRATED DATA

摘要

PROBLEM TO BE SOLVED: To enable to detect squareness calibrated value and contactor calibrated value by alternatevely estimating squareness calibrated value from shape data of a reference spherical surface and contactor calibrated value of shape data of other reference spherical surface. ;SOLUTION: Two reference spherical surface with different curvature-radiuses are shape-measured, and then squareness calibrated value is estimated by shape data of one of the reference spherical surface and contactor calibrated value is estimated by shape data of other reference spherical surface. By repeating these procedures alternatively, the squareness calibrated value calibrating a squareness error caused from squareness shift by a coordinate axis of a coordinate-measuring machine, and the contactor calibrated value calibrating a contactor error caused from distortion to true spherical shape of the contactor are separated to detect. Thereby, a reference spherical surface is easily produced because of no necessity to accurately consist both curvature radiuses of two reference spherical surface.;COPYRIGHT: (C)1999,JPO