PHOTOOXIDATION TREATMENT APPARATUS OF WATER TREATMENT EQUIPMENT FOR MANUFACTURING SEMICONDUCTOR ELEMENT, WATER TREATMENT EQUIPMENT WITH THE SAME, AND TREATING METHOD FOR WATER

摘要

PROBLEM TO BE SOLVED: To provide a photooxidation treatment apparatus of a water treatment equipment for manufacturing a semiconductor element by which the reliability and productivity of the semiconductor element are improved, and to provide a water treatment equipment provided with the photooxidation treatment apparatus, and a treating method for water. ;SOLUTION: A photooxidation treatment apparatus is provided with a UV lamp 20 which radiates UV rays to oxidize organic substances contained in pre-treated water, a photooxidation part 22 which houses the UV lamp 20 and makes water flow, a catalyst part 30 which is installed on a inside wall of the photooxidation part and activates oxidation of the organic substances at the UV radiation. The water treatment equipment with the photooxidation treatment apparatus is provided with a first photooxidation treatment apparatus, a second photooxidation treatment apparatus, a second ion exchange apparatus, and a particle treatment apparatus. Therefore, the reliability and productivity of a semiconductor element can be improved by completely treating organic substances contained in the water.;COPYRIGHT: (C)1999,JPO