CHEMICAL SUBSTANCE MEASURING QUARTZ OSCILLATOR AND CHEMICAL SUBSTANCE DETECTING DEVICE USING IT

摘要

PROBLEM TO BE SOLVED: To provide a carbon film coated quartz oscillator that can be stably used for measurement obtaining response of high sensitivity and manufactured at a low cost, and provide a chemical substance detecting device using this quartz oscillator. ;SOLUTION: An amorphous carbon film 4 is formed on an electrode 2 of a quartz oscillator by sintering so as to constitute a chemical substance measuring quartz oscillator stable in action and high in response sensitivity to chemical substance. Sensitivity can be improved, and selectivity can be imparted by containing carbon powder 5 in the amorphous carbon film 4, and a chemical substance detecting device is constituted using this quartz oscillator with the carbon film.;COPYRIGHT: (C)1999,JPO