TARGET FOR FORMING STRONTIUM TITANATE THIN COATING, ITS PRODUCTION AND FORMATION OF STRONTIUM TITANATE THIN COATING

摘要

PROBLEM TO BE SOLVED: To produce a target for forming strontium titanate thin coating capable of increasing the relative permittivity of the formed SrTiO₃ thin coating to about 50 to 100 even if the substrate temp. at the time of sputtering is ≤200°C, to provide a method therefor and to provide a method for forming strontium titanate thin coating high in relative permittivity by using this target for forming strontium titanate thin coating. ;SOLUTION: Relating to the target for forming strontium titanate thin coating the compositional formula is expressed by SrTiO3 ±δ in the case the excess and deficiency of oxygen from the stoichiometric compsn. of strontium titanate is defined as δ, where δ is ≤0.020. This target for forming thin coating can be produced by baking a strontium titanate thin molded body at 1200 to 1350°C for 3 to 14 hr in the air or in oxygen to obtain a baked body expressed by the compositional formula of SrTiO3±δ in the case the excess and deficiency of oxygen from the stoichiometric compsn. of strontium titanate is defined as δ, where δ is ≤0.020.;COPYRIGHT: (C)1999,JPO