CHEMICAL CIRCULATION TYPE SUBSTRATE PROCESSOR

摘要

PROBLEM TO BE SOLVED: To quickly discharge all chemicals by connecting an auxiliary drain pipe communicated with the inlet of an aspirator to be to at least one portion in a circulation line and thereby allowing a chemical flowing out of a processing vessel to flow from the circulating line into the auxiliary drain pipe in case of emergency. SOLUTION: A water inlet 40 of an aspirator 38 is connected to a pressurized water inlet, for example, a water inlet of a city water line through a water inlet pipe 42. A water outlet 44 of the aspirator 38 is communicated with a water drain pipe 46, and the water drain pipe 46 communicated with a drain pipe 28, or connected to a purification plant separately from the drain pipe 28. In a circulation line, a confluence outflow pipe 22 is branched to provide an auxiliary drain pipe 48, and the auxiliary drain pipe 48 communicates with an inlet 50 of the aspirator 38. The auxiliary drain pipe 48 is provided with a switching valve 52 which is normally closed and opened in case of emergency to entrocluce a washing chemical flowing out of the processing tank 10 and the overflow receiving part 12 from the circulation line to the auxiliary drain pipe 48.