PULSED GAS LASER AND METHOD FOR EXCITING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a pulsed gas laser which is capable of uniformly pre- ionizing an entire discharge space and a method for exciting the laser. ;SOLUTION: In a pulse gas laser which is provided with a laser tube 13 for housing a laser medium, a cathode 14 and an anode 15 arranged in the laser tube 13, and a corona electrode 16 which pre-ionizes the discharge space between the cathode 14 and anode 15, the corona electrode 16 is constituted of a conductor plate 16b having a prescribed width in a direction connecting the cathode 14 and the anode 15 and a dielectric substance 16a which covers at least a part of the conductor plate 16b, and in addition, the conductor plate 16b is extended in the longitudinal direction of the cathode 14.;COPYRIGHT: (C)1999,JPO