Control method of exciting a pulse laser and power supply unit for exciting a pulse laser

摘要

A power supply unit provides therein a first power unit outputting a first excitation amplitude and operating from rising of a reference pulse signal outputted from a reference oscillator until rising of a first time delay signal having a time delay to the reference pulse signal, a second power unit outputting a second excitation amplitude and operating from rising of the first time delay signal until rising of a second time delay signal having a time delay to the first time delay signal, and a third power unit outputting a third excitation amplitude and operating from rising of the second time delay signal until falling of the first time delay signal, and supplies output by synthesizing output from the first power unit, second power unit and the third power unit to the exciting unit.