CURRENT PROBE, ITS MANUFACTURE, CORE USED FOR MANUFACTURING, AND CURRENT PROBE ARRAY

摘要

PROBLEM TO BE SOLVED: To achieve a current probe array for measuring the lead current of an LSI by placing it on an already installed LSI tester. ;SOLUTION: A current probe 2 in a configuration enabling connection to a leading wire 3 is incorporated on the upper surface or the surface layer of an insulation substrate 4. Each pin of an LSI tester is inserted into a hole 21 of each current probe 3 to measure current that flows to each pin, thus measuring the lead current of the LSI by placing a current probe array on an already installed LSI tester since the side of the LSI tester needs not be changed at all.;COPYRIGHT: (C)1999,JPO