Method and apparatus for manufacturing polycrystalline silicon, and method for manufacturing silicon substrate for solar cell

摘要

Problem to be solved: to provide a method and apparatus capable of producing a low cost and mass production as a flow work in a series of continuous steps from a metallic silicon or silicon oxide as a starting material from a metallic silicon or silicon oxide of the starting material It is aimed at. The method of achieving this purpose is to remove the impurity concentration portion of the ingot from the metal silicon, and to remove the impurity concentration portion of the ingot. Boron and carbon were oxidized and removed from the molten metal under the atmosphere, followed by deoxidation of the mixed gas of argon and hydrogen. D. after the deoxidation was removed, the mold was cast into the mold to obtain the ingot. Polycrystalline silicon and solar cells for solar cells are manufactured using the steps of cutting and removing the portions.