METHOD FOR SUPPRESSING ARC DISCHARGE FOR BLOW DISCHARGE TREATMENT AND GLOW DISCHARGE TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To immediately and surely suppress on arc discharge transfer to be generated during glow discharge treatment while performing the glow discharge treatment to an object to be treated. ;SOLUTION: In a glow discharge treatment device 1 which is provided with a main circuit 2 to rectify an AC voltage and to generate a pulse-like discharge voltage, and generates glow discharge in a treatment container by the discharge voltage to perform the glow discharge treatment to an object to be treated 25 in the treatment container 8, a capacitor 20 to be connected in series to a plus side output line L1 of the main circuit and a transistor 22 for discharge to be connected in parallel thereto to discharge the capacitor 20 are arranged, since the transistor 22 for discharge is driven by a dead time signal for each pause timing of the pulse-like discharge voltage, the generated voltage by the capacitor 20 is increased and the discharged voltage is reduced by the discharge current to be simultaneously increased with the generation of the arc discharge transfer and the arc discharge can surely be suppressed in a self-suppressive manner in the initial stage approximately simultaneously with the generation of the arc discharge transfer while continuing the glow discharge treatment.;COPYRIGHT: (C)1999,JPO