METHOD FOR SUPPRESSING ARC DISCHARGE FOR GLOW DISCHARGE TREATMENT AND GLOW DISCHARGE TREATING DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress the generation of arc discharge and to prevent the damage of the surface an object to be treated, in the temp. raising stage of glow discharge treatment, by setting primary rectified smooth voltage lower to the one lower than that in a temp. holding stage and setting the frequency of an inverter to the one higher than that in the temp. holding stage. ;SOLUTION: Commercial three phase alternating voltage is controlled to primary rectified smooth voltage E₁ by a primary rectifying circuit 3 and a smoothing circuit 4 of the main circuit 2, and moreover, by an inverter circuit 5, pulse voltage is obtd. This voltage is increased to discharge one by a voltage increasing transformer 6, which is rectified by a rectifier 7, thereafter, voltage is applied to a treating vessel 8 and a mounting stand 15 to generate glow discharge, and the object 25 to be treated is subjected to surface treatment. In this glow discharge treatment, E₁ in the temp. raising stage is set to the one lower than that in the temp. holding stage by a control unit 18, and moreover, the frequency of an inverter in the temp. raising stage is set to the one higher than that in the temp. holding stage. Furthermore, in the case of the generation of arc discharge in the temp. holding stage, the frequency of the inverter is preferably changed to the higher one for a prescribed time.;COPYRIGHT: (C)1999,JPO