FORMATION OF MOLYBDENUM DISULFIDE COATING AND SOLID LUBRICATING COATING

摘要

PROBLEM TO BE SOLVED: To provide a coating forming method capable of forming molybdenum disulfide coating excellent in lubricity and hard to be broken and to provide solid lubricating coating composed of this molybdenum disulfide coating. ;SOLUTION: This method uses molybdenum disulfide as a target, and molybdenum disulfide coating is formed on the body to be coating-formed by a sputtering method, discharge gas pressure is set to 1 to 4 Pa till the thickness of coating reaches ≥5% of the whole coating thickness from the start of the coating formation on the body to be coating-formed to form lower layer coating, and next, the discharge gas pressure is changed to the condition of 0.1 to 1 Pa, and the remaining coating is formed under condition of the discharge gas pressure after the change in the extent in which the thickness of the lower layer coating is kept to be ≤85% of the whole coating thickness to form the molybdenum disulfide coating in which the whole coating thickness is regulated to 0.1 to 4 μm. And, the solid lubricating coating is composed of the molybdenum disulfide coating formed by the coating forming method.;COPYRIGHT: (C)1999,JPO