FLOW REGULATING VALVE WITH OVERFLOW PREVENTIVE FUNCTION

摘要

PROBLEM TO BE SOLVED: To provide a flow-regulating valve with an overflow preventive function enabling the reduction of failures by decreasing the frequency of flow regulating drive. ;SOLUTION: In a transition period, if actual flow Q is within the range of predetermined first deviation q1 (QS-q₁)≤Q≤QS+q₁) from target flow QS and continues for a predetermined set time T, it is judged to be in a stable period. In the stable period, when any of a following (1) setting temperature TS is changed, (2) gas capacity is changed and (3) the actual flow Q is out of the range of a second deviation q₂ form the target flow QS(QS+q₂QQS-q₂) by the change of flow of more than the predetermined value, it is judged to be in the transition period.;COPYRIGHT: (C)1999,JPO