HYDROGEN GAS CUMULATIVE EXHAUST AMOUNT PREDICTING METHOD AND HYDROGEN GAS EXHAUST CONTROL DEVICE

摘要

PROBLEM TO BE SOLVED: To optimally determine the regeneration and replacement times of activated carbon for cryopump. ;SOLUTION: A calculation part 35 obtains a hydrogen gas cumulative exhaust amount and a hydrogen gas exhaust capacity of activated carbon using a relational expression between the recovery pressure of the hydrogen and the hydrogen gas cumulative exhaust amount of activated carbon stored in a memory 36. A control part 33 controls the calculation part 35 based on a partial hydrogen pressure inside a chamber 31 measured by a partial pressure gauge 32 so as to judge the regeneration time of the activated carbon and the replacement time of a second stage cryopanel 26. When it is judged to be the regeneration time, an RV driver 40 is controlled for regeneration treatment. On the other hand, when it is judged to be the replacement time, that is displayed on a display part 43. Thus the regeneration time of the activated carbon and the replacement time of the second stage cryopanel 26 are determined optimally.;COPYRIGHT: (C)1999,JPO