FRICTION FORCE PROBE MICROSCOPE AND IDENTIFYING METHOD OF ATOMIC SPECIES AND MATERIAL BY USING FRICTION FORCE PROBE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To enable measuring the frictional force and shearing stress and identifying atomic species and material, by constituting a scanning tunneling microscope having an active cantilever which can arbitrarily control deflection in the direction perpendicular to the longitudinal direction of the cantilever by using a magnetic field. ;SOLUTION: Distance between a specimen 4 and a cantilever 5 is reduced by applying a control voltage to a piezoelectric member 3 in the Z direction by using a piezoelectric member driving equipment 9. After contact of a probe and the specimen 4, the specimen is scanned and imaged. At this time, in the case that a large frictional force acts on the probe and the specimen 4, the lever 5 is deflected in the direction perpendicular to the longitudinal direction. Torsion of the lever 5 is returned to zero by making a current flow to a magnetic field controlling equipment 12. The frictional force using a magnetic force can be imaged by monitoring a current needed fro generating a magnetic field at that time. By vibration-scanning the lever 5 in the direction perpendicular to the longitudinal direction with a generated AC external magnetic field, material can be identified by using the degree of attenuation of the vibration.;COPYRIGHT: (C)1999,JPO