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METHOD FOR POLISHING WAVELENGTH CONVERSION CRYSTAL AND WAVELENGTH CONVERSION ELEMENT POLISHED BY THIS METHOD

机译:抛光波长转换晶体的方法和该方法抛光的波长转换元件

摘要

PROBLEM TO BE SOLVED: To improve an optical polishing method in such a manner that the flaws and dents of a polished surface may be decreased and the accuracy of surface roughness improved by optically polishing crystals for a wavelength conversion element by using a polishing material consisting of zirconia powder having a specific particle size. ;SOLUTION: The crystals for the wavelength conversion element are optically polished by using the polishing material consisting of the zirconia powder having the particle size not over 1 μm and larger than 0.2 μm. Namely, the particles 7 of 0.5 μm in the particle size of the zirconia is large in r of the particles and are, therefore, small in the curvature of the particles exposed on the surface of pitch and since the accuracy of the surface roughness of a polishing plate is improved, the accuracy of the surface roughness of the polishing plate is improved as well. If the r of the zirconia is made further as finer as 0.2 μm, the increase in the ruggedness of the surface of the polishing plate is resulted and the conversely degraded surface roughness is resulted. The probability of the occurrence of the flaws and dents by the flocculation of the particles with each other at the particle size attaining 1 μm increases and, therefore, 0.5 μm is the optimum particle size of the polishing material.;COPYRIGHT: (C)1998,JPO
机译:解决的问题:以如下方式改进光学抛光方法:通过使用由以下材料组成的抛光材料对波长转换元件进行光学抛光,可以减少抛光表面的缺陷和凹痕,并提高表面粗糙度的精度。具有特定粒度的氧化锆粉末。 ;解决方案:通过使用由粒径不超过1μm且大于0.2μm的氧化锆粉末组成的抛光材料对波长转换元件的晶体进行光学抛光。即,氧化锆的粒径为0.5μm的粒子7的粒子r大,因此,暴露于沥青表面的粒子的曲率小,并且由于a的表面粗糙度的精度高。改进了抛光板,也提高了抛光板表面粗糙度的精度。如果将氧化锆的r进一步细化至0.2μm,则导致抛光板的表面的粗糙度增加,并且导致相反的劣化的表面粗糙度。粒径达到1μm时,由于粒子彼此的絮凝而导致出现裂纹和凹痕的可能性增加,因此0.5μm是抛光材料的最佳粒径。;版权:(C)1998 ,日本特许厅

著录项

  • 公开/公告号JPH10301152A

    专利类型

  • 公开/公告日1998-11-13

    原文格式PDF

  • 申请/专利权人 NEC CORP;

    申请/专利号JP19970112652

  • 发明设计人 KOUDA HIKARI;

    申请日1997-04-30

  • 分类号G02F1/35;C30B29/10;

  • 国家 JP

  • 入库时间 2022-08-22 02:34:55

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